BDS2 System

Inline Voltage & Current Probe

Identify & Minimize RF Process Variability

Using sophisticated parallel signal processing, the BDS2 simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.

A robust frequency tracking algorithm guarantees accurate measurements under dynamic signal conditions. With this data, power and impedance are calculated at each frequency, giving users the ability to identify small discrepancies that may make the difference between a successful and a failed process.

The optional Time-Domain mode allows exceptional visibility into the shape of pulsed RF waveforms in the non-50 ohm environment. Similar to an oscilloscope, the BDS2 will display a one-shot, triggered view of the pulse envelope. Uniquely, however, the BDS2 will display the waveform in voltage, current, phase, power, or impedance to the fully specified accuracy of the system.

PRODUCT FEATURES

· 1% accurate measurement of RF voltage and current with a locked system

· Calculated impedance, RF power

· Multi-level pulse or CW waveforms

· 1-3 fundamental frequencies

· 4 harmonics per fundamental frequency

· 6 intermodulation products per fundamental pair

· Time-domain mode

· Tracking & Spectral search mode

· Ethernet enabled

APPLICATIONS

· Chamber to chamber matching

· RF process monitoring

· Impedance matching

· Troubleshooting RF delivery system

· Identify process drifts

· Harmonic levels up to 252 MHz are available for analysis

· Voltage, current, phase and delivered power comparison

CONNECTION OPTIONS (SENSOR)

7001A550-1-xxyy (Choose xx yy options from table below)

Input Connector (xx)	Output Connector (yy)
01 = N(f)	01 = N(f)
02 = N(m)	02 = N(m)
12 = HN(f)	12 = HN(f)
13 = HN(m)	13 = HN(m)
14 = 7/16(f)	14 = 7/16(f)
15 = 7/16(m)	15 = 7/16(m)

product specifications:

Item No

BDS2 System

Item Name

Inline Voltage & Current Probe

SYSTEM

System Components - Unlocked System

Receiver: 7001A900-2, BDS2 Single Ch. Receiver w/Ethernet
Calibrated Data Cable: 7001B040-5M, RF/Data Cable Set 5 M straight
Sensor Options
(Contact factory for a custom designed sensor and custom frequency combinations)
7001A550-1-xx yy, Sensor, BDS2, QC Connectors
(Choose xx yy options from the Connection Options table above)
7001A550-2, Sensor, BDS2, Protruding Dielectric Connection

System Kits - Locked System

7001A500-1-xxyy, BDS2 Kit (Receiver, Cable and Sensor Kit), QC Connectors
(Choose xx yy options from the Connection Options table above)
7001A500-1-2, BDS2 Kit (Receiver, Cable and Sensor Kit), Protruding Dielectric Connection

System Profiles

Please see datasheet

Time Domain Measurement Options

7001A993-1, Factory Install License
7001A993F-1, Field Install License

Time Domain Measurement Mode

Time Resolution: 500 ns
Configurable Time Scale: 0.1 to 10 ms
Average: Trace Average
Trigger
Voltage or current waveform
Rising or falling edge
External triggering
Upper/lower thresholds
Holdoff
Pre- and Post- Trigger Buffer: 5% to 95%

MEASUREMENT

Measurements

Voltage, current, phase, frequency, impedance, power at frequencies selected by user

Frequency

Range: 307 kHz - 252 MHz (Sensor Dependent)
Resolution: 100 Hz
Accuracy: ± 1 kHz

Number of Fundamentals

Up to 3 simultaneously. For more than 1 fundamental, choose from the following
(or contact the factory for custom combinations):
- 0.4, 13.56, 160 MHz
- 0.4, 60 MHz
- 1, 13.56 MHz
- 2, 27.12, 60 MHz
- 3.2, 40.68 MHz
- 3.2, 60 MHz
- 12.88, 40.68 MHz
- 13.56, 100 MHz

Tracking

Frequency Slew Rate: 2 GHz/sec
Minimum Pulse Width: 5 μsec

Number of Harmonics

4 harmonics per fundamental, 6 intermodulation products per pair of fundamentals up to 252 MHz
Limited by the maximum number of measurement channels
Tracking & Spectral search mode: 12 harmonics standard mode
6 in time domain mode

Update Rates

100 Hz typical

Network Protocol

Ethernet

RF Power Max

Determined by RF sensor, (Typically 10kW or higher)

RF Connector

Custom or QC

Operating Modes

Tracking mode, Spectral Search mode

ENVIRONMENTAL

Receiver